Atomic Layer Deposition of Transparent VOxThin Films for Resistive Switching Applications
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Title
Atomic Layer Deposition of Transparent VOxThin Films for Resistive Switching Applications
Authors
Keywords
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Journal
CHEMICAL VAPOR DEPOSITION
Volume 20, Issue 7-8-9, Pages 291-297
Publisher
Wiley
Online
2014-08-04
DOI
10.1002/cvde.201407122
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