Nanomechanical switches based on metal-insulator-metal capacitors from a standard complementary-metal-oxide semiconductor technology

CMOS-MEMS switches based on back-end metal layers

(2014) J.L. Muñoz-Gamarra et al.   MICROELECTRONIC ENGINEERING

Curved in-plane electromechanical relay for low power logic applications

(2013) Daniel Grogg et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

A sub-1-volt nanoelectromechanical switching device

(2012) Jeong Oen Lee et al.   Nature Nanotechnology

Nanoelectromechanical contact switches

(2012) Owen Y. Loh et al.   Nature Nanotechnology

A Low-Voltage Torsion Nanorelay

(2011) Joshua Rubin et al.   IEEE ELECTRON DEVICE LETTERS

Perfectly Complementary Relay Design for Digital Logic Applications

(2010) Jaeseok Jeon et al.   IEEE ELECTRON DEVICE LETTERS

Low Voltage Nanoelectromechanical Switches Based on Silicon Carbide Nanowires

(2010) X. L. Feng et al.   NANO LETTERS

Mechanical Computing Redux: Relays for Integrated Circuit Applications

(2010) Vincent Pott et al.   PROCEEDINGS OF THE IEEE

Fabrication and characterization of a nanoelectromechanical switch with 15-nm-thick suspension air gap

(2008) Weon Wi Jang et al.   APPLIED PHYSICS LETTERS

Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range

(2008) J. Verd et al.   IEEE ELECTRON DEVICE LETTERS