Fabrication and characterization of a nanoelectromechanical switch with 15-nm-thick suspension air gap

Title
Fabrication and characterization of a nanoelectromechanical switch with 15-nm-thick suspension air gap
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 92, Issue 10, Pages 103110
Publisher
AIP Publishing
Online
2008-03-12
DOI
10.1063/1.2892659

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