Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range

Published 2008 View Full Article

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Title
Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 29, Issue 2, Pages 146-148
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-01-26
DOI
10.1109/led.2007.914085

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