Correlation between threading dislocation density and sheet resistance of AlGaN/AlN/GaN heterostructures grown by plasma-assisted molecular beam epitaxy

Title
Correlation between threading dislocation density and sheet resistance of AlGaN/AlN/GaN heterostructures grown by plasma-assisted molecular beam epitaxy
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 100, Issue 26, Pages 262102
Publisher
AIP Publishing
Online
2012-06-27
DOI
10.1063/1.4730951

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