Noble gas retention in the target during rotating cylindrical magnetron sputtering

Published 2008 View Full Article

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Title
Noble gas retention in the target during rotating cylindrical magnetron sputtering
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 93, Issue 6, Pages 061501
Publisher
AIP Publishing
Online
2008-08-13
DOI
10.1063/1.2970037
References
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