High $Q$-Factor In-Plane-Mode Resonant Microsensor Platform for Gaseous/Liquid Environment

Published 2008 View Full Article

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Title
High $Q$-Factor In-Plane-Mode Resonant Microsensor Platform for Gaseous/Liquid Environment
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 17, Issue 2, Pages 483-493
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-04-10
DOI
10.1109/jmems.2008.916328
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