Crystallized HfLaO embedded tetragonal ZrO2 for dynamic random access memory capacitor dielectrics

标题
Crystallized HfLaO embedded tetragonal ZrO2 for dynamic random access memory capacitor dielectrics
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 98, Issue 17, Pages 173505
出版商
AIP Publishing
发表日期
2011-04-28
DOI
10.1063/1.3583590

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