Process and Material Properties of HfLaO[sub x] Prepared by Atomic Layer Deposition

Published 2008 View Full Article

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Title
Process and Material Properties of HfLaO[sub x] Prepared by Atomic Layer Deposition
Authors
Keywords
-
Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 155, Issue 10, Pages G189
Publisher
The Electrochemical Society
Online
2008-09-06
DOI
10.1149/1.2960995

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