Comparison of the interfacial and electrical properties of HfAlO films on Ge with S and GeO2 passivation

Title
Comparison of the interfacial and electrical properties of HfAlO films on Ge with S and GeO2 passivation
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 98, Issue 16, Pages 162903
Publisher
AIP Publishing
Online
2011-04-20
DOI
10.1063/1.3581051

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