Comparison of the interfacial and electrical properties of HfAlO films on Ge with S and GeO2 passivation

标题
Comparison of the interfacial and electrical properties of HfAlO films on Ge with S and GeO2 passivation
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 98, Issue 16, Pages 162903
出版商
AIP Publishing
发表日期
2011-04-20
DOI
10.1063/1.3581051

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