Effects of gate-first and gate-last process on interface quality of In0.53Ga0.47As metal-oxide-semiconductor capacitors using atomic-layer-deposited Al2O3 and HfO2 oxides

Title
Effects of gate-first and gate-last process on interface quality of In0.53Ga0.47As metal-oxide-semiconductor capacitors using atomic-layer-deposited Al2O3 and HfO2 oxides
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 95, Issue 25, Pages 253501
Publisher
AIP Publishing
Online
2009-12-23
DOI
10.1063/1.3275001

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