S passivation of GaAs and band bending reduction upon atomic layer deposition of HfO2/Al2O3 nanolaminates

Published 2008 View Full Article

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Title
S passivation of GaAs and band bending reduction upon atomic layer deposition of HfO2/Al2O3 nanolaminates
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 93, Issue 6, Pages 061907
Publisher
AIP Publishing
Online
2008-08-16
DOI
10.1063/1.2961003
References
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