Chemical and physical interface studies of the atomic-layer-deposited Al2O3 on GaAs substrates

Published 2008 View Full Article

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Title
Chemical and physical interface studies of the atomic-layer-deposited Al2O3 on GaAs substrates
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 92, Issue 22, Pages 223501
Publisher
AIP Publishing
Online
2008-06-03
DOI
10.1063/1.2937404
References
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