Nucleation of epitaxial graphene on SiC substrate by thermal annealing and chemical vapor deposition

Title
Nucleation of epitaxial graphene on SiC substrate by thermal annealing and chemical vapor deposition
Authors
Keywords
Chemical Vapor Deposition, Chemical Vapor Deposition Process, Epitaxial Graphene, Highly Order Pyrolytic Graphite, Tensile Stress Field
Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 112, Issue 2, Pages 349-355
Publisher
Springer Nature
Online
2013-05-06
DOI
10.1007/s00339-013-7715-2

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