Performance comparison of Pb(Zr0.52Ti0.48)O3-only and Pb(Zr0.52Ti0.48)O3-on-silicon resonators

Title
Performance comparison of Pb(Zr0.52Ti0.48)O3-only and Pb(Zr0.52Ti0.48)O3-on-silicon resonators
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 93, Issue 23, Pages 233504
Publisher
AIP Publishing
Online
2008-12-12
DOI
10.1063/1.3046717

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