AlN/3C-SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators
出版年份 2012 全文链接
标题
AlN/3C-SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators
作者
关键词
-
出版物
ADVANCED MATERIALS
Volume 24, Issue 20, Pages 2722-2727
出版商
Wiley
发表日期
2012-04-12
DOI
10.1002/adma.201104842
参考文献
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