Internal Dielectric Transduction in Bulk-Mode Resonators

Title
Internal Dielectric Transduction in Bulk-Mode Resonators
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 18, Issue 6, Pages 1401-1408
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2009-11-04
DOI
10.1109/jmems.2009.2032480

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