Three-dimensional Directed Assembly of Block Copolymers together with Two-dimensional Square and Rectangular Nanolithography
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Title
Three-dimensional Directed Assembly of Block Copolymers together with Two-dimensional Square and Rectangular Nanolithography
Authors
Keywords
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Journal
ADVANCED MATERIALS
Volume 23, Issue 32, Pages 3692-3697
Publisher
Wiley
Online
2011-07-07
DOI
10.1002/adma.201101813
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- Block Copolymer Nanolithography: Translation of Molecular Level Control to Nanoscale Patterns
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- Block Copolymer Based Nanostructures: Materials, Processes, and Applications to Electronics
- (2009) Ho-Cheol Kim et al. CHEMICAL REVIEWS
- Templated Self-Assembly of Square Symmetry Arrays from an ABC Triblock Terpolymer
- (2009) Vivian P. Chuang et al. NANO LETTERS
- Theoretically informed coarse grain simulations of block copolymer melts: method and applications
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- Dense Self-Assembly on Sparse Chemical Patterns: Rectifying and Multiplying Lithographic Patterns Using Block Copolymers
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- (2008) Chuanbing Tang et al. MACROMOLECULES
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- (2008) Adam M. Welander et al. MACROMOLECULES
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- Patterned Media: Nanofabrication Challenges of Future Disk Drives
- (2008) E.A. Dobisz et al. PROCEEDINGS OF THE IEEE
- Evolution of Block Copolymer Lithography to Highly Ordered Square Arrays
- (2008) C. Tang et al. SCIENCE
- Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly
- (2008) R. Ruiz et al. SCIENCE
- Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates
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