Design, Fabrication, and Implementation of an Array-Type MEMS Piezoresistive Intelligent Pressure Sensor System
Published 2018 View Full Article
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Title
Design, Fabrication, and Implementation of an Array-Type MEMS Piezoresistive Intelligent Pressure Sensor System
Authors
Keywords
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Journal
Micromachines
Volume 9, Issue 3, Pages 104
Publisher
MDPI AG
Online
2018-03-01
DOI
10.3390/mi9030104
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