Design Optimization and Fabrication of High-Sensitivity SOI Pressure Sensors with High Signal-to-Noise Ratios Based on Silicon Nanowire Piezoresistors
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Title
Design Optimization and Fabrication of High-Sensitivity SOI Pressure Sensors with High Signal-to-Noise Ratios Based on Silicon Nanowire Piezoresistors
Authors
Keywords
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Journal
Micromachines
Volume 7, Issue 10, Pages 187
Publisher
MDPI AG
Online
2016-10-14
DOI
10.3390/mi7100187
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