Experimental evaluation of sensitivity and non-linearity in polysilicon piezoresistive pressure sensors with different diaphragm sizes

Published 2014 View Full Article

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Title
Experimental evaluation of sensitivity and non-linearity in polysilicon piezoresistive pressure sensors with different diaphragm sizes
Authors
Keywords
Polysilicon, Differential Stress, High Stress Region, Polysilicon Layer, Diaphragm Thickness
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 22, Issue 1, Pages 83-91
Publisher
Springer Nature
Online
2014-11-15
DOI
10.1007/s00542-014-2369-3
References
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