A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators
Published 2018 View Full Article
- Home
- Publications
- Publication Search
- Publication Details
Title
A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators
Authors
Keywords
-
Journal
Micromachines
Volume 9, Issue 4, Pages 173
Publisher
MDPI AG
Online
2018-04-11
DOI
10.3390/mi9040173
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- Investigation of Multimodal Electret-Based MEMS Energy Harvester With Impact-Induced Nonlinearity
- (2018) Kai Tao et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Oscillations of functionally graded microbeams
- (2017) Mergen H. Ghayesh et al. INTERNATIONAL JOURNAL OF ENGINEERING SCIENCE
- Size-dependent performance of microgyroscopes
- (2016) Mergen H. Ghayesh et al. INTERNATIONAL JOURNAL OF ENGINEERING SCIENCE
- Modal Analysis of a Single-Structure Multiaxis MEMS Gyroscope
- (2016) Muhammad Ali Shah et al. Journal of Sensors
- A Review on Key Issues and Challenges in Devices Level MEMS Testing
- (2016) Muhammad Shoaib et al. Journal of Sensors
- Thermo-mechanical dynamics of perfect and imperfect Timoshenko microbeams
- (2015) Hamed Farokhi et al. INTERNATIONAL JOURNAL OF ENGINEERING SCIENCE
- Single-Side Fabrication of Multilevel 3-D Microstructures for Monolithic Dual Sensors
- (2015) Jiachou Wang et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Design and implementation of an out-of-plane electrostatic vibration energy harvester with dual-charged electret plates
- (2015) Kai Tao et al. MICROELECTRONIC ENGINEERING
- Quality factor measurement for MEMS resonator using time-domain amplitude decaying method
- (2014) Yuzhao Wang et al. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
- Oxidized bridges technology for suspended MEMS fabrication using standard silicon wafer
- (2014) A. Postnikov et al. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
- The Development of Micromachined Gyroscope Structure and Circuitry Technology
- (2014) Dunzhu Xia et al. SENSORS
- Design Criteria of Low-Power Oscillators for Consumer-Grade MEMS Resonant Sensors
- (2013) Giacomo Langfelder et al. IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
- Nonlinear behaviour of electrically actuated MEMS resonators
- (2013) Mergen H. Ghayesh et al. INTERNATIONAL JOURNAL OF ENGINEERING SCIENCE
- Measurement uncertainties in resonant characteristics of MEMS resonators
- (2013) Il Lee et al. Journal of Mechanical Science and Technology
- Determination of Parameters With Uncertainties for Quality Control in MEMS Fabrication
- (2013) Marc Gennat et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Nonlinear forced vibrations of a microbeam based on the strain gradient elasticity theory
- (2012) Mergen H. Ghayesh et al. INTERNATIONAL JOURNAL OF ENGINEERING SCIENCE
- High-Precision Time-Domain Measurement of Quality Factor
- (2011) Ming Zhang et al. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
- Direct parameter extraction in feedthrough-embedded capacitive MEMS resonators
- (2011) Joshua E.-Y. Lee et al. SENSORS AND ACTUATORS A-PHYSICAL
- A Resonant Microaccelerometer With High Sensitivity Operating in an Oscillating Circuit
- (2010) Claudia Comi et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Parasitic feedthrough cancellation techniques for enhanced electrical characterization of electrostatic microresonators
- (2009) J.E.-Y. Lee et al. SENSORS AND ACTUATORS A-PHYSICAL
- Temperature Dependence of Quality Factor in MEMS Resonators
- (2008) Bongsang Kim et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Quality factor measurement of micro gyroscope structure according to vacuum level and desired Q-factor range package method
- (2008) Jong-Seok Kim et al. MICROELECTRONICS RELIABILITY
Find the ideal target journal for your manuscript
Explore over 38,000 international journals covering a vast array of academic fields.
SearchAdd your recorded webinar
Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.
Upload Now