Single-Side Fabrication of Multilevel 3-D Microstructures for Monolithic Dual Sensors

Published 2015 View Full Article

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Title
Single-Side Fabrication of Multilevel 3-D Microstructures for Monolithic Dual Sensors
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 24, Issue 3, Pages 531-533
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2015-05-07
DOI
10.1109/jmems.2015.2423296

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