Quality factor measurement for MEMS resonator using time-domain amplitude decaying method

Published 2014 View Full Article

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Title
Quality factor measurement for MEMS resonator using time-domain amplitude decaying method
Authors
Keywords
Decay Amplitude, Sweeping Method, Vacuum Packaging, Decay Vibration, Natural Resonant Frequency
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 21, Issue 4, Pages 825-829
Publisher
Springer Nature
Online
2014-04-22
DOI
10.1007/s00542-014-2161-4
References
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