Quality factor measurement of micro gyroscope structure according to vacuum level and desired Q-factor range package method

Published 2008 View Full Article

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Title
Quality factor measurement of micro gyroscope structure according to vacuum level and desired Q-factor range package method
Authors
Keywords
-
Journal
MICROELECTRONICS RELIABILITY
Volume 48, Issue 6, Pages 948-952
Publisher
Elsevier BV
Online
2008-04-19
DOI
10.1016/j.microrel.2008.03.001

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