A first-principles analysis of ballistic conductance, grain boundary scattering and vertical resistance in aluminum interconnects
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Title
A first-principles analysis of ballistic conductance, grain boundary scattering and vertical resistance in aluminum interconnects
Authors
Keywords
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Journal
AIP Advances
Volume 8, Issue 5, Pages 055127
Publisher
AIP Publishing
Online
2018-05-24
DOI
10.1063/1.5027084
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