Mechanical properties of silicon in subsurface damage layer from nano-grinding studied by atomistic simulation
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Title
Mechanical properties of silicon in subsurface damage layer from nano-grinding studied by atomistic simulation
Authors
Keywords
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Journal
AIP Advances
Volume 8, Issue 5, Pages 055223
Publisher
AIP Publishing
Online
2018-05-24
DOI
10.1063/1.5021654
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