Investigation of machining mechanism of monocrystalline silicon in nanometric grinding

Published 2017 View Full Article

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Title
Investigation of machining mechanism of monocrystalline silicon in nanometric grinding
Authors
Keywords
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Journal
AIP Advances
Volume 7, Issue 5, Pages 055104
Publisher
AIP Publishing
Online
2017-05-05
DOI
10.1063/1.4983216
References
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