Molecular dynamics simulation of subsurface deformed layers in AFM-based nanometric cutting process

Title
Molecular dynamics simulation of subsurface deformed layers in AFM-based nanometric cutting process
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 254, Issue 15, Pages 4774-4779
Publisher
Elsevier BV
Online
2008-02-01
DOI
10.1016/j.apsusc.2008.01.096

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