Mechanical properties of silicon in subsurface damage layer from nano-grinding studied by atomistic simulation
出版年份 2018 全文链接
标题
Mechanical properties of silicon in subsurface damage layer from nano-grinding studied by atomistic simulation
作者
关键词
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出版物
AIP Advances
Volume 8, Issue 5, Pages 055223
出版商
AIP Publishing
发表日期
2018-05-24
DOI
10.1063/1.5021654
参考文献
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