Optical emission spectroscopy diagnosis of energetic Ar ions in synthesis of SiC polytypes by DC arc discharge plasma

Title
Optical emission spectroscopy diagnosis of energetic Ar ions in synthesis of SiC polytypes by DC arc discharge plasma
Authors
Keywords
SiC polytype, nanostructures, direct current (DC) arc discharge plasma, optical emission spectroscopy(OES)
Journal
Nano Research
Volume 11, Issue 3, Pages 1470-1481
Publisher
Springer Nature
Online
2017-09-07
DOI
10.1007/s12274-017-1764-3

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