Optical emission spectroscopy diagnosis of energetic Ar ions in synthesis of SiC polytypes by DC arc discharge plasma
出版年份 2018 全文链接
标题
Optical emission spectroscopy diagnosis of energetic Ar ions in synthesis of SiC polytypes by DC arc discharge plasma
作者
关键词
SiC polytype, nanostructures, direct current (DC) arc discharge plasma, optical emission spectroscopy(OES)
出版物
Nano Research
Volume 11, Issue 3, Pages 1470-1481
出版商
Springer Nature
发表日期
2017-09-07
DOI
10.1007/s12274-017-1764-3
参考文献
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