Structural, Electrical and Optical Properties of Sputtered-Grown InN Films on ZnO Buffered Silicon, Bulk GaN, Quartz and Sapphire Substrates

Title
Structural, Electrical and Optical Properties of Sputtered-Grown InN Films on ZnO Buffered Silicon, Bulk GaN, Quartz and Sapphire Substrates
Authors
Keywords
InN film, RF sputtering, ZnO buffer layer, different substrates, III–V nitrides
Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 47, Issue 8, Pages 4875-4881
Publisher
Springer Nature
Online
2018-05-23
DOI
10.1007/s11664-018-6386-3

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