Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy

Title
Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
Authors
Keywords
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Journal
CRYSTAL GROWTH & DESIGN
Volume 13, Issue 4, Pages 1485-1490
Publisher
American Chemical Society (ACS)
Online
2013-02-08
DOI
10.1021/cg3016172

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