Sputtered growth of high mobility InN thin films on different substrates using Cu-ZnO buffer layer

Published 2017 View Full Article

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Title
Sputtered growth of high mobility InN thin films on different substrates using Cu-ZnO buffer layer
Authors
Keywords
InN film, RF sputtering, Cu-ZnO buffer layer, High mobility, III-V nitrides
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 71, Issue -, Pages 166-173
Publisher
Elsevier BV
Online
2017-08-01
DOI
10.1016/j.mssp.2017.07.025

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