Silicon doped hafnium oxide (HSO) and hafnium zirconium oxide (HZO) based FeFET: A material relation to device physics
出版年份 2018 全文链接
标题
Silicon doped hafnium oxide (HSO) and hafnium zirconium oxide (HZO) based FeFET: A material relation to device physics
作者
关键词
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出版物
APPLIED PHYSICS LETTERS
Volume 112, Issue 22, Pages 222903
出版商
AIP Publishing
发表日期
2018-06-01
DOI
10.1063/1.5029324
参考文献
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