Silicon doped hafnium oxide (HSO) and hafnium zirconium oxide (HZO) based FeFET: A material relation to device physics

标题
Silicon doped hafnium oxide (HSO) and hafnium zirconium oxide (HZO) based FeFET: A material relation to device physics
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 112, Issue 22, Pages 222903
出版商
AIP Publishing
发表日期
2018-06-01
DOI
10.1063/1.5029324

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