Detection and clustering of mixed-type defect patterns in wafer bin maps

A system for online detection and classification of wafer bin map defect patterns for manufacturing intelligence

(2013) Chen-Fu Chien et al.   INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH

Detection of Spatial Defect Patterns Generated in Semiconductor Fabrication Processes

(2011) Tao Yuan et al.   IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

Multi-step ART1 algorithm for recognition of defect patterns on semiconductor wafers

(2011) Gyunghyun Choi et al.   INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH

Bayesian spatial defect pattern recognition in semiconductor fabrication using support vector clustering

(2010) Tao Yuan et al.   INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY

Wafer defect pattern recognition by multi-class support vector machines by using a novel defect cluster index

(2009) Li-Chang Chao et al.   EXPERT SYSTEMS WITH APPLICATIONS

Separation of composite defect patterns on wafer bin map using support vector clustering

(2008) Chih-Hsuan Wang   EXPERT SYSTEMS WITH APPLICATIONS

Automatic Identification of Defect Patterns in Semiconductor Wafer Maps Using Spatial Correlogram and Dynamic Time Warping

(2008) Young-Seon Jeong et al.   IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

Spatial defect pattern recognition on semiconductor wafers using model-based clustering and Bayesian inference

(2007) Tao Yuan et al.   EUROPEAN JOURNAL OF OPERATIONAL RESEARCH

Recognition of semiconductor defect patterns using spatial filtering and spectral clustering

(2007) Chih-Hsuan Wang   EXPERT SYSTEMS WITH APPLICATIONS

Defect spatial pattern recognition using a hybrid SOM–SVM approach in semiconductor manufacturing

(2007) Te-Sheng Li et al.   EXPERT SYSTEMS WITH APPLICATIONS