Spatial defect pattern recognition on semiconductor wafers using model-based clustering and Bayesian inference

Published 2007 View Full Article

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Title
Spatial defect pattern recognition on semiconductor wafers using model-based clustering and Bayesian inference
Authors
Keywords
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Journal
EUROPEAN JOURNAL OF OPERATIONAL RESEARCH
Volume 190, Issue 1, Pages 228-240
Publisher
Elsevier BV
Online
2007-06-11
DOI
10.1016/j.ejor.2007.06.007

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