Wafer defect pattern recognition by multi-class support vector machines by using a novel defect cluster index

Published 2009 View Full Article

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Title
Wafer defect pattern recognition by multi-class support vector machines by using a novel defect cluster index
Authors
Keywords
-
Journal
EXPERT SYSTEMS WITH APPLICATIONS
Volume 36, Issue 6, Pages 10158-10167
Publisher
Elsevier BV
Online
2009-01-27
DOI
10.1016/j.eswa.2009.01.003

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