Influence of N2/Ar Flow Ratio on Microstructure and Properties of the AlCrSiN Coatings Deposited by High-Power Impulse Magnetron Sputtering
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Title
Influence of N2/Ar Flow Ratio on Microstructure and Properties of the AlCrSiN Coatings Deposited by High-Power Impulse Magnetron Sputtering
Authors
Keywords
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Journal
Coatings
Volume 8, Issue 1, Pages 3
Publisher
MDPI AG
Online
2017-12-22
DOI
10.3390/coatings8010003
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