Microstructure and Properties of the Cr–Si–N Coatings Deposited by Combining High-Power Impulse Magnetron Sputtering (HiPIMS) and Pulsed DC Magnetron Sputtering
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Title
Microstructure and Properties of the Cr–Si–N Coatings Deposited by Combining High-Power Impulse Magnetron Sputtering (HiPIMS) and Pulsed DC Magnetron Sputtering
Authors
Keywords
Cr–Si–N coating, High-power impulse magnetron sputtering (HiPIMS), Pulsed DC magnetron sputtering, Mechanical property, Friction coefficient
Journal
Acta Metallurgica Sinica-English Letters
Volume 30, Issue 7, Pages 688-696
Publisher
Springer Nature
Online
2017-06-15
DOI
10.1007/s40195-017-0609-0
References
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