Effect of nitrogen-argon flow ratio on the microstructural and mechanical properties of AlSiN thin films prepared by high power impulse magnetron sputtering

Title
Effect of nitrogen-argon flow ratio on the microstructural and mechanical properties of AlSiN thin films prepared by high power impulse magnetron sputtering
Authors
Keywords
High power impulse magnetron sputtering, Nitrogen-argon flow ratio, Duty cycle, AlSiN coating
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 320, Issue -, Pages 138-145
Publisher
Elsevier BV
Online
2017-01-24
DOI
10.1016/j.surfcoat.2017.01.085

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