Effect of nitrogen-argon flow ratio on the microstructural and mechanical properties of AlSiN thin films prepared by high power impulse magnetron sputtering
Effect of nitrogen-argon flow ratio on the microstructural and mechanical properties of AlSiN thin films prepared by high power impulse magnetron sputtering
Authors
Keywords
High power impulse magnetron sputtering, Nitrogen-argon flow ratio, Duty cycle, AlSiN coating
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