Three-dimensional thickness and property distribution of TiC films deposited by DC magnetron sputtering and HIPIMS

Title
Three-dimensional thickness and property distribution of TiC films deposited by DC magnetron sputtering and HIPIMS
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 250, Issue -, Pages 37-43
Publisher
Elsevier BV
Online
2014-02-09
DOI
10.1016/j.surfcoat.2014.02.011

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