A review comparing cathodic arcs and high power impulse magnetron sputtering (HiPIMS)

Title
A review comparing cathodic arcs and high power impulse magnetron sputtering (HiPIMS)
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 257, Issue -, Pages 308-325
Publisher
Elsevier BV
Online
2014-09-02
DOI
10.1016/j.surfcoat.2014.08.043

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