New horizons in sputter depth profiling inorganics with giant gas cluster sources: Niobium oxide thin films
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Title
New horizons in sputter depth profiling inorganics with giant gas cluster sources: Niobium oxide thin films
Authors
Keywords
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Journal
SURFACE AND INTERFACE ANALYSIS
Volume 49, Issue 10, Pages 991-999
Publisher
Wiley
Online
2017-07-06
DOI
10.1002/sia.6259
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