Molecular depth profiling of multilayer structures of organic semiconductor materials by secondary ion mass spectrometry with large argon cluster ion beams

Title
Molecular depth profiling of multilayer structures of organic semiconductor materials by secondary ion mass spectrometry with large argon cluster ion beams
Authors
Keywords
-
Journal
RAPID COMMUNICATIONS IN MASS SPECTROMETRY
Volume 23, Issue 20, Pages 3264-3268
Publisher
Wiley
Online
2009-09-17
DOI
10.1002/rcm.4250

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