Formation of solid-solution Cu-to-Cu joints using Ga solder and Pt under bump metallurgy for three-dimensional integrated circuits
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Title
Formation of solid-solution Cu-to-Cu joints using Ga solder and Pt under bump metallurgy for three-dimensional integrated circuits
Authors
Keywords
3D IC packaging, Cu-to-Cu bonding, GA-based solder, transient liquid phase (TLP) bonding, under bump metallurgy
Journal
Electronic Materials Letters
Volume 11, Issue 4, Pages 687-694
Publisher
Springer Nature
Online
2015-06-30
DOI
10.1007/s13391-015-5015-z
References
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