Precise regulation of tilt angle of Si nanostructures via metal-assisted chemical etching
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Title
Precise regulation of tilt angle of Si nanostructures via metal-assisted chemical etching
Authors
Keywords
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Journal
Nanoscale
Volume 9, Issue 1, Pages 449-453
Publisher
Royal Society of Chemistry (RSC)
Online
2016-11-29
DOI
10.1039/c6nr08384f
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