A novel 2-step ALD route to ultra-thin MoS2films on SiO2through a surface organometallic intermediate
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Title
A novel 2-step ALD route to ultra-thin MoS2films on SiO2through a surface organometallic intermediate
Authors
Keywords
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Journal
Nanoscale
Volume 9, Issue 2, Pages 538-546
Publisher
Royal Society of Chemistry (RSC)
Online
2016-09-26
DOI
10.1039/c6nr06021h
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